application package AFM

The SPEM is a combination of Imaging Ellipsometer based on Nanofilm’s EP³ and the scanning probe microscope ULTRA-Objective (UO) from S.I.S. GmbH. Take advantage of the convenience of imaging ellipsometry to visualize thin films and surface structures, and then zoom into nanometer details with Scanning Probe Microscopy on the same spot! Our SPEM integrates two full-featured instruments via intelligent sample handling, integrating complementary data from two independent methods without the need for laborious sample positioning.

The SPEM enables the user to:

• measure the same field of view with imaging ellipsometer and scanning probe microscope
• observe nano-steps in the live contrast-image of the ellipsometer, draw your region of interest around the nano-steps, and record surface film thickness, profiles/maps with EP³ (large field of view, quick) or by UO (submicron lateral resolution, slow ~ 3 min for an 80 µm by 80 µm scan)
• map thickness and optical properties (refractive index/extinction) and 3D-profile/surface-roughness at the same spot on a sample within minutes, due to software-controlled sample transport between EP³ and UO with smaller than 20 µm accuracy and 2 µm repeatability

Two companies have teamed up to give you the SPEM -the new tool for the Nanoworld

SIS, as one of the leading makers of SPMs, uses proprietary technology for their ULTRAObjective, one of the most versatile SPMs on the market today. Nanofilm is the pioneer of imaging ellipsometry, setting new standards in non-contact optical surface analysis

With the SPEM it becomes reality

The perfect combination of high-resolution scanning probe microscopy and ellipsometry. Only the SPEM allows you to inspect the same region of interest with a SPM and an Ellipsometric Microscope, opening up new possibilities in quantitative surface characterization